Journal
APPLIED PHYSICS LETTERS
Volume 96, Issue 7, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.3327514
Keywords
carbon nanotubes; hysteresis; nanoelectromechanical devices; nanoelectronics; nanofabrication; switches
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Funding
- Swiss Nano-Tera Program
- Swiss National Science Foundation [200021-117966]
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Electrostatically actuated nanoelectromechanical switches based on intershell displacement mechanisms within batch fabricated, bidirectional multiwalled carbon nanotube (MWNT) bearings are reported. Multiple devices with a 220 nm pitch are constructed within individual MWNT supermolecules. Experimental results on performance metrics including low switching voltages (0.8 to 6 V), repeatability, hysteresis, and failure modes are presented.
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