Journal
APPLIED PHYSICS LETTERS
Volume 96, Issue 15, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.3387753
Keywords
bending; cantilevers; fluid oscillations; gold; lead compounds; microfluidics; microsensors; piezoelectric devices; thick film sensors; vibrational modes; viscosity
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Funding
- CPER Pole 4N Nanosciences en Aquitaine [GP-206-action 216/1]
- Conseil Regional d'Aquitaine
- FEDER
- Ministry of Education and Research
- French National Agency [ANR-08-NANO- 004]
- Conseil Regional d'Aquitaine [20091102001]
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We report on the fabrication of a self-actuated resonant-microsensor, based on a thick-film piezoelectric cantilever, dedicated to either (bio)chemical detection in gaseous or liquid media or fluid characterization. The aim of this paper is to demonstrate that longitudinal modes can be used in highly viscous environments. Lower levels of fluid-solid interaction in comparison with classical flexural modes are expected from the results of our analytical model of a cantilever oscillating in a fluid. For example, in various fluid ranging from air to a Newtonian fluid of 300 cP viscosity, measured quality factors for the first longitudinal mode range from 300 to 20.
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