4.5 Article Proceedings Paper

Direct fabrication and patterning of Cu2O film by local electrodeposition method

Journal

SOLID STATE IONICS
Volume 175, Issue 1-4, Pages 541-544

Publisher

ELSEVIER SCIENCE BV
DOI: 10.1016/j.ssi.2004.01.081

Keywords

direct patterning; soft solution process; Cu2O; thin film; electrodeposition

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We have developed a direct patterning method to form Cu2O patterns onto substrates by an electrodeposition method with a glass capillary tube, including an electrolyte containing CuSO4 and chelating agent. Cu2O pattern on the titanium substrates was successfully fabricated at 60 degreesC. Furthermore, we found that the chelating agent, which has -CH(OH)COOH group, was effective to form crystalline Cu-2 patterns. (C) 2004 Elsevier B.V. All rights reserved.

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