Journal
APPLIED PHYSICS LETTERS
Volume 95, Issue 26, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.3280860
Keywords
electron mean free path; electron mobility; graphene; ion beam effects; silicon compounds; vacancies (crystal)
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Using a method based on scanning capacitance spectroscopy, local measurements of the electron mean free path (l) and mobility (mu) have been carried out on single layers of graphene (SLG) mechanically exfoliated from highly oriented pyrolytic graphite and deposited on SiO2/Si. Lateral inhomogeneity of l and mu was found both on pristine and ion irradiated SLG with different C ion fluences (from 10(13) to 10(14) cm(-2)), with an increasing spread in the distribution of l and mu for larger fluences. Before irradiation, the spread was explained by the inhomogeneous distribution of charged impurities on SLG surface and/or at the interface with SiO2. After irradiation, lattice vacancies cause a local reduction of mu in the damaged regions.
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