Journal
APPLIED PHYSICS LETTERS
Volume 94, Issue 15, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.3118579
Keywords
elemental semiconductors; lattice constants; microcavities; optical waveguide filters; optical waveguides; photonic crystals; silicon
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Funding
- NSF [CCF0507295]
- CONACYT-UCMEXUS [157685]
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Photonic crystal cavities consisting of three holes missing along a principal axis in a triangular lattice of holes in a silicon slab were fabricated. Each cavity was built into a waveguide to form a Lorentzian filter. Two samples were constructed with lattice constants a=80 and 76 mu m, with a radius r=0.30a in a 44 mu m thick high-resistivity silicon wafer. Transmission experiment show a single sharp resonance near 1 THz in each sample with quality factor Q as high as 1020. Contributions to the measured Q from cavity-waveguide coupling, radiative loss, and material loss are determined.
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