Journal
APPLIED PHYSICS LETTERS
Volume 95, Issue 18, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.3259415
Keywords
chemical vapour deposition; electrical contacts; graphene; nanoelectromechanical devices; nanofabrication; switches; thin films
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Funding
- DARPA [N66001-08-1-2002]
- MARCO Interconnect Focus Center
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We demonstrate an electromechanical switch comprising two polycrystalline graphene films; each deposited using ambient pressure chemical vapor deposition. The top film is pulled into electrical contact with the bottom film by application of approximately 5 V between the layers. Contact is broken by mechanical restoring forces after bias is removed. The device switches several times before tearing. Demonstration of switching at low voltage confirms that graphene is an attractive material for electromechanical switches. Reliability may be improved by scaling the device area to within one crystalline domain of the graphene films.
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