Related references
Note: Only part of the references are listed.Unusual thermal fatigue behaviors in 60 nm thick Cu interconnects
J. Zhang et al.
SCRIPTA MATERIALIA (2009)
Elastic phase response of silica nanoparticles buried in soft matter
Laurene Tetard et al.
APPLIED PHYSICS LETTERS (2008)
Imaging nanoparticles in cells by nanomechanical holography
Laurene Tetard et al.
NATURE NANOTECHNOLOGY (2008)
Fatigue of damascene copper lines under cyclic electrical loading
S. Moreau et al.
MICROELECTRONIC ENGINEERING (2007)
Combined surface-focused acoustic microscopy in transmission and scanning ultrasonic holography
Evgeny Twerdowski et al.
ULTRASONICS (2006)
Quantitative nanoscale modulus measurements and elastic imaging of SnO2 nanobelts
Yuegui Zheng et al.
JOURNAL OF APPLIED PHYSICS (2006)
Thermal fatigue as a possible failure mechanism in copper interconnects
YB Park et al.
THIN SOLID FILMS (2006)
Nanoscale imaging of buried structures via scanning near-field ultrasound holography
GS Shekhawat et al.
SCIENCE (2005)
Elastic-property measurements of ultrathin films using atomic force acoustic microscopy
M Kopycinska-Müller et al.
NANOTECHNOLOGY (2005)
High-resolution optical imaging of magnetic-domain structures
W Dickson et al.
IEEE TRANSACTIONS ON NANOTECHNOLOGY (2005)
Local elasticity imaging of ferroelectric domains in Pb(Mg1/3Nb2/3)O3-PbTiO3 single crystals by low-frequency atomic force acoustic microscopy
HR Zeng et al.
SOLID STATE COMMUNICATIONS (2005)
Nanomechanical defect imaging in premetal dielectrics for integrated circuits
L Muthuswami et al.
APPLIED PHYSICS LETTERS (2004)
Atomic force microscopy study of living diatoms in ambient conditions
IC Gebeshuber et al.
JOURNAL OF MICROSCOPY-OXFORD (2003)
Biological imaging with a near-field optical setup
M Denyer et al.
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY (2003)
Three-dimensional laser-induced photoacoustic tomography of mouse brain with the skin and skull intact
XD Wang et al.
OPTICS LETTERS (2003)
Two-dimensional photoacoustic imaging by use of Fourier-transform image reconstruction and a detector with an anisotropic response
KP Köstli et al.
APPLIED OPTICS (2003)
In situ SEM observation of electromigration phenomena in fully embedded copper interconnect structures
MA Meyer et al.
MICROELECTRONIC ENGINEERING (2002)
Nanometer-scale mechanical imaging of aluminum damascene interconnect structures in a low-dielectric-constant polymer
RE Geer et al.
JOURNAL OF APPLIED PHYSICS (2002)
Three-dimensional X-ray structural microscopy with submicrometre resolution
BC Larson et al.
NATURE (2002)
Metal film crawling in interconnect structures caused by cyclic temperatures
M Huang et al.
ACTA MATERIALIA (2001)
Heterodyne force microscopy of PMMA/rubber nanocomposites: nanomapping of viscoelastic response at ultrasonic frequencies
MT Cuberes et al.
JOURNAL OF PHYSICS D-APPLIED PHYSICS (2000)
Thin film characterization by atomic force microscopy at ultrasonic frequencies
KB Crozier et al.
APPLIED PHYSICS LETTERS (2000)
Share Paper
