Fabrication of the gating nanopore device

We synthesized gating nanopores with embedded nanogap electrodes in a solid-state nanopore using an 11-step nanofabrication process. We were able to detect Au nanoparticles passing through a 30-nm-diameter gating nanopore via an electric current between nanoelectrodes. The electric current was proportional to the duration of translocation time. The gating nanopore is expected to be a next-generated nanosystem that can be applied to single-molecule sensors. (C) 2009 American Institute of Physics. [doi: 10.1063/1.3236769]