Journal
APPLIED PHYSICS LETTERS
Volume 95, Issue 3, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.3144272
Keywords
aluminium; annealing; crystal microstructure; electron energy loss spectra; interface states; MOSFET; semiconductor thin films; silicon compounds; surface chemistry; wide band gap semiconductors
Categories
Ask authors/readers for more resources
The interfacial region between silicon carbide (SiC) and its native oxide contains a high density of interfacial traps, which is considered a major problem leading to a lower mobility that has hindered SiC metal oxide semiconductor field effect transistors from reaching their theoretical expectations. We investigate the microstructure and chemistry of the 4H-SiC/SiO2 interface due to variations in nitric oxide annealing and aluminum implantation using Z-contrast imaging and electron energy loss spectroscopy. A transition layer with a carbon to silicon ratio greater than 1 is consistently observed on the SiC side of the interface in each of these samples, and the width of this transition layer is found to be inversely related to the effective channel mobility measured on fabricated devices.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available