Journal
APPLIED PHYSICS LETTERS
Volume 95, Issue 1, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.3176946
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- The Dutch Technology Foundation STW [STW-TFN 10018]
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Infrared spectroscopy was used to obtain absolute number information on the reaction products during atomic layer deposition of Pt from (methylcyclopentadienyl)trimethylplatinum [(MeCp)PtMe3] and O-2. From the detection of CO2 and H2O it was established that the precursor ligands are oxidatively decomposed during the O-2 pulse mainly. Oxygen atoms chemisorbed at the Pt lead to likewise ligand oxidation during the (MeCp)PtMe3 pulse however the detection of a virtually equivalent density of CO2 and CH4 also reveals a concurrent ligand liberation reaction. The surface coverage of chemisorbed oxygen atoms found is consistent with the saturation coverage reported in surface science studies. (C) 2009 American Institute of Physics. [DOI: 10.1063/1.3176946]
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