Related references
Note: Only part of the references are listed.Depth dependence of ultraviolet curing of organosilicate low-k thin films
Taek-Soo Kim et al.
JOURNAL OF APPLIED PHYSICS (2008)
Tuning depth profiles of organosilicate films with ultraviolet curing
Taek-Soo Kim et al.
JOURNAL OF APPLIED PHYSICS (2008)
Optical property changes in low-k films upon ultraviolet-assisted curing
Salvador Eslava et al.
JOURNAL OF THE ELECTROCHEMICAL SOCIETY (2008)
Effect of pressure on efficiency of UV curing of CVD-derived low-k material at different wavelengths
L. Prager et al.
MICROELECTRONIC ENGINEERING (2008)
Measuring the Young's modulus of ultralow-k materials with the non destructive picosecond ultrasonic method
L. L. Chapelon et al.
MICROELECTRONIC ENGINEERING (2006)
Short-ranged structural rearrangement and enhancement of mechanical properties of organosilicate glasses induced by ultraviolet radiation
F Iacopi et al.
JOURNAL OF APPLIED PHYSICS (2006)
Reflection and transmission of light in multilayers perturbed by picosecond strain pulse propagation
O Matsuda et al.
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS (2002)
Share Paper
