Journal
APPLIED PHYSICS LETTERS
Volume 95, Issue 9, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.3220063
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We achieve depth-profiling of the elasticity of a thin transparent film of a nanoporous low-k material using picosecond acoustic interferometry. The variation in the material properties with depth is extracted from time-resolved femtosecond optical reflectivity measurements. More than 40% of the variation in the longitudinal elastic modulus between the front and the back surfaces of an 800 nm thick nanoporous layer is mapped with a 40 nm spatial resolution. We attribute this variation to the spatially inhomogeneous UV curing of the film during fabrication. (C) 2009 American Institute of Physics. [DOI: 10.1063/1.3220063]
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