Replicated photonic crystals by atomic layer deposition within holographically defined polymer templates

We report the replication of holographically defined photonic crystals using multistage atomic layer deposition. Low- and high-temperature atomic layer depositions were combined with selective etching to deposit and remove multiple conformal thin films within three-dimensional polymer templates. Using intermediate Al(2)O(3) inverse replicas, temperature-sensitive SU-8 photonic crystal templates were faithfully replicated with TiO(2) and GaP, greatly increasing the dielectric contrasts of the photonic crystals. Optical measurements are in good agreement with the calculated band structures.