Journal
APPLIED PHYSICS LETTERS
Volume 94, Issue 12, Pages -Publisher
AIP Publishing
DOI: 10.1063/1.3100194
Keywords
carrier mobility; electrodes; field effect transistors; flexible electronics; high-k dielectric thin films; indium compounds; nanoelectronics; nanowires; semiconductor materials; semiconductor quantum wires; silicon compounds; tin; zinc
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Funding
- Research Grants Council of Hong Kong SAR China [CityU 101608]
- U. S. Army International Technology Center-Pacific
- National Basic Research Program of China [2007CB936000, 2006CB933000]
- National High Technology Research and Development Program of China [2006AA03Z302, 2007AA03Z301]
- National Natural Science Foundation of China [60806028]
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We report the fabrication of fully transparent and flexible nanowire transistors by combining a high-quality In2O3:Zn nanowire channel, a SiNx high-kappa dielectric, and conducting Sn-doped In2O3 electrodes on a polyethylene terephthalate substrate. The devices show excellent operating characteristics with high carrier mobilities up to 631 cm(2) V-1 s(-1), a drain-source current on/off modulation ratio similar to 1x10(6), a high on-state current similar to 1x10(-5) A, a small subthreshold gate voltage swing of 120 mV decade(-1), and a near zero threshold voltage. The devices further show high reproducibility and stable performance under bending condition. The high-performance nanowire transistors would enable application opportunities in flexible and transparent electronics.
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