Journal
APPLIED PHYSICS LETTERS
Volume 94, Issue 9, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.3092482
Keywords
adsorbed layers; adsorption; energy gap; III-V semiconductors; indium compounds; molecular beam epitaxial growth; photoluminescence; plasma materials processing; reflection high energy electron diffraction; semiconductor epitaxial layers; semiconductor growth; stacking faults; surface roughness; wide band gap semiconductors
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Funding
- AFOSR
- NSF
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The role of the In adlayer on the morphological and structural properties of nonpolar a-plane InN films was elucidated during the plasma-assisted molecular beam epitaxy on freestanding GaN. Reflection high energy electron diffraction during In adsorption experiments on a-plane InN surfaces revealed a stable In adlayer coverage of similar to 2 ML. This In adlayer-mediated growth was responsible for achieving atomically smooth surfaces (rms roughness of < 1 nm), phase-pure material with lower x-ray rocking curve widths (Delta omega < 0.5 degrees), lower crystal mosaic tilt/twist, and decreased stacking fault densities, compared to N-rich conditions. The photoluminescence peak emission and band gap energy of the a-plane InN films were similar to 0.63 and similar to 0.7 eV, respectively.
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