Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 51, Issue 12, Pages 1978-1983Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2004.838451
Keywords
ink-jet printing; passive circuits; printed circuit fabrication; lithography
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An all ink-jet-deposited process capable of creating high-quality passive devices suitable for an RFID front-end is described. Gold nanocrystals are printed to create conductive lines with sheet resistance as low as 23 mf? per square. Optimal printing conditions are found for polyimide dielectric layers and films as thin as 340 nm are produced. These results are used to create spiral inductors, interconnect, and parallel plate capacitors.
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