4.6 Article

Electron heating in radio-frequency capacitively coupled atmospheric-pressure plasmas

Journal

APPLIED PHYSICS LETTERS
Volume 93, Issue 26, Pages -

Publisher

AMER INST PHYSICS
DOI: 10.1063/1.3058686

Keywords

electron avalanches; plasma ohmic heating; plasma radiofrequency heating; plasma sheaths

Funding

  1. Engineering and Physical Sciences Research Council, U. K.

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In atmospheric-pressure plasmas the main electron heating mechanism is Ohmic heating, which has distinct spatial and temporal evolutions in the alpha and gamma modes. In gamma discharges, ionizing avalanches in the sheaths are initiated not only by secondary electrons but also by metastable pooling reactions. In alpha discharges, heating takes place at the sheath edges and in contrast with low-pressure plasmas, close to 50% of the power absorbed by the electrons is absorbed at the edge of the retreating sheaths. This heating is due to a field enhancement caused by the large collisionality in atmospheric-pressure discharges.

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