Hydrocarbon lithography on graphene membranes

We present a simple and efficient way to obtain freestanding graphene membranes. On these membranes, we demonstrate that electron-beam induced deposition of carbon can be used to obtain arbitrary patterns with a nanometer-scale resolution. In the case of a periodic grating, we obtain a half-pitch of 2.5 nm. Electron-beam induced deposition on graphene might be used to create nanometer-scale doping patterns, diffraction gratings, or etch masks in this novel electronic material. (c) 2008 American Institute of Physics.