Journal
APPLIED PHYSICS LETTERS
Volume 93, Issue 22, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.3039809
Keywords
barium compounds; electrical conductivity transitions; electrical resistivity; electrodes; ferroelectric semiconductors; oxidation; platinum; reduction (chemical); secondary ion mass spectra; semiconductor materials; semiconductor thin films; semiconductor-metal boundaries; strontium compounds; time of flight mass spectra; tungsten
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Funding
- Intel, Inc., Santa Clara
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We compared the resistive switching performance of barium strontium titanate (BST) thin films with tungsten (W) and platinum (Pt) top electrodes, respectively. The yield, endurance, and reliability were strongly improved for the samples with W top electrode. Whereas the samples with Pt top electrode show a fast drop in the resistance for both high and low resistance states, the devices with W top electrode can be switched for 10(4) times without any obvious degradation. We attribute the improved switching performance to a reversible oxidation and reduction in a WO(x) layer at the W-BST interface, which was detected by time-of-flight secondary-ion-mass spectroscopy measurements.
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