4.6 Article

Observation of Ti4+ ions in a high power impulse magnetron sputtering plasma

Journal

APPLIED PHYSICS LETTERS
Volume 93, Issue 7, Pages -

Publisher

AMER INST PHYSICS
DOI: 10.1063/1.2973179

Keywords

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Funding

  1. Wenner-Gren Foundations, Sweden [EP/D049202/1]
  2. Assistant Secretary for Energy Efficiency and Renewable Energy, Office of Building Technology
  3. U. S. Department of Energy [DE-AC02-05CH11231]
  4. Engineering and Physical Sciences Research Council [EP/D049202/1] Funding Source: researchfish
  5. EPSRC [EP/D049202/1] Funding Source: UKRI

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Multiply charged titanium ions including Ti4+ were observed in high power impulse magnetron sputtering discharges. Mass/charge spectrometry was used to identify metal ion species. Quadruply charged titanium ions were identified by isotope-induced broadening at mass/charge 12. Due to their high potential energy, Ti4+ ions give a high yield of secondary electrons, which in turn are likely to be responsible for the generation of multiply charged states. (c) 2008 American Institute of Physics.

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