Journal
APPLIED PHYSICS LETTERS
Volume 92, Issue 6, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.2842416
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Epitaxial Sm2O3 thin films were deposited on (001) SrTiO3 substrates by pulsed laser deposition. The structural and dielectric properties were investigated. Microstructural studies by x-ray diffraction and transmission electron microscopy showed that the Sm2O3 thin films have a cubic structure and an epitaxial relationship of (004)(Sm2)O-3 parallel to(002)(SrTiO3) and [440](Sm2)O-3 parallel to[200](SrTiO3). A high dielectric constant of 30.5 was found, which can be attributed to the cubic structure and the high crystalline quality and shows a potential application of epitaxial Sm2O3 thin film for high-k material. (C) 2008 American Institute of Physics.
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