Journal
APPLIED PHYSICS LETTERS
Volume 85, Issue 24, Pages 6051-6053Publisher
AMER INST PHYSICS
DOI: 10.1063/1.1835553
Keywords
-
Categories
Ask authors/readers for more resources
Electrical connections through microfabricated suspensions on a pneumatically pumped elastomer membrane were demonstrated. A method to fabricate the suspensions on the elastomer membrane was developed. The elastomer membrane was 1 mm in diameter and 120 mum in thickness. Resistances of the microfabricated suspensions measured across the elastomer membrane were within 1% difference when the membrane's center deflection ranged from 0 to 100 mum, which corresponded to a numerical aperture change from 0 to 0.2 as well as a 2.6% elongation of the elastomer. (C) 2004 American Institute of Physics.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available