Journal
THIN SOLID FILMS
Volume 469, Issue -, Pages 416-419Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2004.06.178
Keywords
sodium fluoride; thin film; aerosol-assisted chemical vapour deposition
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Thin films of sodium fluoride were created by the use of aerosol-assisted chemical vapour deposition between 200 and 600 degreesC on glass substrates. The films were found to be crystalline and single-phase (NaF) using X-ray diffraction. Scanning electron microscopy energydispersive analysis of X-rays gave coherent elemental compositions indicating that monophasic NaF was made with negligible impurity levels. The films appeared hazy and showed little optical transmission (5-10%) and reflectance (similar to2%). (C) 2004 Published by Elsevier B.V.
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