Journal
APPLIED PHYSICS EXPRESS
Volume 6, Issue 5, Pages -Publisher
JAPAN SOC APPLIED PHYSICS
DOI: 10.7567/APEX.6.055601
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Funding
- Japan Society for the Promotion of Science [23360143]
- Strategic International Cooperative Program (Nanoelectronics) from the Japan Science and Technology Agency
- Grants-in-Aid for Scientific Research [23360143] Funding Source: KAKEN
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A new technique reported herein was proposed for high carbon conversion efficiency from methane to diamond in microwave plasma-assisted chemical vapor deposition. The efficiency is increased by balancing the carbon feeding rate with the reactor and carbon consumption rate for diamond growth. The maximum conversion efficiency was as great as 80%. C-12-enriched diamond films thus grown showed high isotopic enrichment of approx. 99.998%. (C) 2013 The Japan Society of Applied Physics
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