Journal
APPLIED PHYSICS EXPRESS
Volume 4, Issue 8, Pages -Publisher
JAPAN SOC APPLIED PHYSICS
DOI: 10.1143/APEX.4.082201
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Funding
- Japan Society for the Promotion of Science
- Ministry of Education, Culture, Sports, Science and Technology
- VLSI Design and Education Center (VDEC)
- University of Tokyo
- Cadence Corporation
- Grants-in-Aid for Scientific Research [23360028] Funding Source: KAKEN
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We report the first observation of second-harmonic generation in thin rectangular high-index-contrast (HIC) birefringent-phase-matching (BPM) waveguides. We fabricated HIC waveguides composed of 0.103-mu m-thick Al(0.5)Ga(0.5)As core layers sandwiched between 1-mu m-thick oxidized Al(0.93)Ga(0.07)As cladding layers by using wet etching and wet oxidation techniques. BPM has been achieved in the 1.55 mu m fundamental wavelength region in 1.7-1.86-mu m-wide rib-type HIC waveguides. The guide-width dependence of the phase matching wavelength is in an agreement with numerical simulation. (C) 2011 The Japan Society of Applied Physics
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