Journal
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
Volume 16, Issue 2, Pages 119-121Publisher
SPRINGER
DOI: 10.1007/s10854-005-6461-4
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Porous silicon is a fascinating light-emitting material among silicon-related materials. We have challenged to form a patterned porous silicon layer for the purpose of the micro optical devices with the help of photolithography. Photoresist has been used as a mask that prevented the formation of porous silicon. We achieved square patterned porous silicon with a precision of 30 mu m. We also found a problem that the formation of porous silicon also proceeded under the mask partly. (C) 2005 Springer Science + Business Media, Inc.
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