4.8 Article

Recent progress in soft lithography

Journal

MATERIALS TODAY
Volume 8, Issue 2, Pages 50-56

Publisher

ELSEVIER SCI LTD
DOI: 10.1016/S1369-7021(05)00702-9

Keywords

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Funding

  1. Defense Advanced Research Projects Agency
  2. US Department of Energy
  3. National Science Foundation
  4. Grainger Foundation
  5. Petroleum Research Fund
  6. Dow Corning
  7. DuPont

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The future of nanoscience and nanotechnology depends critically on techniques for micro- and nanofabrication. An emerging set of methods, known collectively as soft lithography, uses elastomeric stamps, molds, and conformable photomasks for patterning two- and three-dimensional structures with minimum feature sizes deep into the nanometer regime. The powerful patterning capabilities of these techniques together with their experimental simplicity make them useful for a wide range of applications. This article reviews recent progress in the field of soft lithography, with a focus on trends in research and steps toward commercialization.

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