Journal
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Volume 118, Issue 4, Pages 1233-1238Publisher
SPRINGER HEIDELBERG
DOI: 10.1007/s00339-014-8821-5
Keywords
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Funding
- National Nature Science Foundation of China [51272135]
- Natural Science Foundation of Shandong Province [ZR2013HL044]
- State Key Laboratory of Nuclear Physics and Technology, Peking University
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Blistering and cracking in LiTaO3 surface are investigated after 200-keV helium ion implantation and subsequent post-implantation annealing. Rutherford backscattering/channeling is used to examine the lattice damage caused by ion implantation. Blistering is observed through optical microscopy in a dynamic heating process. Atomic force microscopy and scanning electron microscopy measurements are used to detect the LiTaO3 surface morphology. Experimental results show that blistering and flaking are dependent on implantation fluence, beam current, and also annealing temperature. We speculate that the surface cracking of He+-implanted LiTaO3 results from the implantation-induced stress and compression.
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