Journal
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Volume 114, Issue 1, Pages 69-73Publisher
SPRINGER
DOI: 10.1007/s00339-013-8083-7
Keywords
-
Ask authors/readers for more resources
Large area linear and crossed grating structures on steel surfaces are obtained by UV-femtosecond-laser ablation at 248 nm. High resolution on large areas is secured using a beam delivery system based on a two-grating interferometer. Thus, deterministic gratings with periods down to 330 nm and modulation depths of more than 100 nm are fabricated on tool steel and stainless steel. Areas of up to mm can be processed without stitching errors.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available
Share Paper
