4.7 Article

Mechanical and electrical characterization of β-Ga2O3 nanostructures for sensing applications

Journal

IEEE SENSORS JOURNAL
Volume 5, Issue 1, Pages 20-25

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSEN.2004.838669

Keywords

beta-Ga2O3 sensor; ethanol sensing; nanowire; resonance

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Single crystalline beta-Ga2O3 nanowire and nanoribbon materials were synthesized, and electrical and mechanical properties were studied for sensing applications. The structural analysis showed that the Ga2O3 nanomaterials were stoicheometric and had the same crystal lattice structure as the beta phase Ga2O3 crystal. The mechanical study on individual Ga2O3 nanowires and nanoribbons showed that they had a bending modulus of around 300 GPa, are flexible (in bending and twisting), and are easy to be cleaved along their crystal lattice. The current-voltage electrical characterization through the thickness of nanoribbon and along the length of nanowire confirmed their semiconducting characteristic. A two-terminal device fabricated with an individual Ga2O3 nanowire showed good sensing response to ethanol gas at low-operating temperature, which revealed the potential of using such nanostructures for effective sensing applications.

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