On the threshold voltage of strained-Si-Si1-xGex MOSFETs

The threshold voltage shifts (DeltaV(t(SS)) relative to V-t of Si-control devices) in strained-Si-Si1-xGex (SS) CMOS devices are carefully examined in terms of the shifted two-dimensional energy subbands and the modified effective conduction- and valance-band densities of states. Increased electron affinity as well as bandgap narrowing in the SS layer are shown to be the predominant components of DeltaV(t(SS)), whereas the density-of-state terms tend to be relatively small but not insignificant. The study reveals, for both n-channel and p-channel SS MOSFETs, important physical insights on the varied surface potential at threshold, defined by energy quantization as well as the strain, and on the shifted flat-band voltage that is also part of DeltaV(t(SS)). Models for DeltaV(t(SS)) dependent on the Ge content (x), with comparisons to published data, are presented and used to show that redesign of channel doping in the SS nMOSFET to increase the significantly reduced V-tn(SS) for off-state current control tends to substantively diminish the inherent SS CMOS relative speed enhancement, e.g., by more than 40% for x = 0.20. Interestingly, the SS pMOSFET model predicts small increases in the magnitude of V-tp(SS).