Journal
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Volume 108, Issue 1, Pages 41-52Publisher
SPRINGER
DOI: 10.1007/s00339-012-6999-y
Keywords
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Funding
- Basic Science Research Program through the National Research Foundation of Korea (NRF)
- Ministry of Education Science and Technology [NRF-2010-0012249]
- Center for Advanced Soft Electronics under the Global Frontier Research Program of the MEST, Korea [2011-0032147]
- National Research Foundation of Korea [2010-0012249] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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In this study, accurate nanostructures with various aspect ratios are created on several types of material. This work is highly applicable to the energy, optical, and nano-bio fields, for example. A silicon (Si) nano-mold is preserved using the method described, and target nanostructures are replicated reversibly and unlimitedly to or from various hard and soft materials. It is also verified that various materials can be applied to the substrates. The results confirm that the target nanostructures are successfully created in precise straight line structures and circle structures with various aspect ratios, including extremely high aspect ratios of 1:18. It is suggested that the optimal replicating and demolding process of nanostructures with high aspect ratios, which are the most problematic, could be controlled by means of the surface energy between the functional materials. Relevant numerical and analytical studies are also performed. It is possible to expand the applicability of the nanostructured mold by adopting various backing materials, including rounded substrates. The scope of the applications is extended further by transferring the nanostructures between different species of materials including metallic materials as well as identical species.
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