Journal
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Volume 105, Issue 3, Pages 517-528Publisher
SPRINGER HEIDELBERG
DOI: 10.1007/s00339-011-6594-7
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Funding
- Office of Naval Research (ONR)
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This review discusses the origins and evolution of the MAPLE technique as it started as an alternative to spray coating of thin films for chemical vapor sensors. It describes its numerous applications for the deposition of thin films of polymeric, organic and biomaterials for various applications. This is followed by an overview of several new variations of the MAPLE technique. This review concludes with an outlook on the future of this highly versatile and successful vapor deposition process.
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