Powder preparation for 0.5 Pb(Ni1/3Nb2/3)O3-0.15 PbZrO3-0.35PbTiO3 thick films by the aerosol deposition method

Powders of 0.5Pb(Ni1/3Nb2/3)O-3-0.15PbZrO(3)-0.35PbTiO(3)(PNN/PZT) composition that were calcined at 850, 900, and 950 degrees C were deposited as a thick film on a stainless-steel SUS304 substrate using an aerosol deposition method (ADM) at room temperature. A film with single perovskite phase was obtained only in the case of using the raw powder calcined at 950 degrees C. The measured deposition rate of ADM was as high as 1 mu m/min for a film of 10 x 10 mm(2) area. The film annealed at 600 degrees C was formed by polycrystallites with 83-nm average diameter, but transmission electron microscope observation revealed that amorphous phase and fine polycrystallites formed the as-deposited film. The best electric properties were obtained for the deposited film using the raw material powders calcined at 950 degrees C. The obtained values are: remnant polarization (Pr), 18 mu C/cm(2); coercive field (E-c), 65 kV/cm; dielectric constant (epsilon(tau)), 750 at 1 kHz; and dielectric loss (tan delta), 0.04 at 1 kHz. (c) 2004 Elsevier B.V. All rights reserved.