Ceramic dielectric film for microwave filter deposited at room temperature

Integrating and embedding passive components like resistors, capacitors, and inductors into a single system module is an attractive way of achieving downsizing, cost reduction, and higher performance in RF wireless communication products such as cellular phones and personal digital assistants (PDA). The aerosol deposition (AD) method can be used to produce modules with passive components by incorporating different materials with appropriate electrical properties. Our tentative goal is to use the AD method to develop a compact microwave filter that can be incorporated into a single RF module for frequencies of more than 10 GHz with low loss. Since bulk Ba(Zn1/3Ta2/3)O-3 has a high Q value at high frequencies, it is a promising candidate for use as a filter dielectric. In this paper, we present the results of our experiments and offer discussions regarding the microstructure, internal stress, and dielectric properties of Ba(Zn1/3Ta2/3)O-3 AD films deposited under a range of conditions. (c) 2004 Elsevier B.V. All rights reserved.