Journal
APPLIED SURFACE SCIENCE
Volume 241, Issue 1-2, Pages 61-67Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.apsusc.2004.09.018
Keywords
CMP; ceria; EELS; segregation; non-stoichiometry
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Surfaces of ceria (CeO2) particles have been studied by electron energy-loss spectroscopy in a field-emission gun scanning transmission electron microscope. All the ceria particles analyzed contained Ce3+ at the surface. Rare-earth impurities such as La were enriched at the surface and were observed for particles ranging from tens to hundreds of nanometers in size. Fluorine in the abrasives corresponded to a lower average cerium valence. Time series investigations indicate that fluorine substitutes on the oxygen sub-lattice and is charge-balanced by some cerium changing from Ce4+ to Ce3+ (C) 2004 Elsevier B.V. All rights reserved.
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