Development of imaging energy analyzer using multipole Wien filter

We discussed a new design of a Wien filter energy analyzer for an energy-filtered X-ray photoemission electron microscopy system. We have demonstrated that the second-order aberration and the third-order aperture aberration can be corrected by the multipole Wien filter by adjusting multipole components of electric and magnetic fields up to octupole components. The three-dimensional charge simulation method indicated that 12 electrodes and magnetic poles can effectively reproduce these ideal electric and magnetic fields. (C) 2004 Elsevier B.V. All rights reserved.