Journal
OPTICAL ENGINEERING
Volume 44, Issue 3, Pages -Publisher
SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
DOI: 10.1117/1.1869892
Keywords
microbolometer; antenna-coupled detectors; wavelength-tunable detectors
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Wavelength tuning is demonstrated in an antenna-coupled infrared microbolometer. With a 300-mV control voltage, we observed a tuning range of 0.5 mu m near 10 mu m. A metal-oxide-semiconductor capacitor underneath the antenna arms causes the shift of resonance wavelength with applied voltage. We develop a device model that agrees well with measured results. (c) 2005 Society of Photo-Optical Instrumentation Engineers.
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