Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 15, Issue 3, Pages 663-672Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/15/3/030
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Funding
- Engineering and Physical Sciences Research Council [GR/S67135/01] Funding Source: researchfish
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Active and passive micromachined corner cube reflectors (CCRs) with high surface flatness and precise assembly are demonstrated by out-of-plane rotation of bonded silicon parts powered by the surface tension of thick photoresist pads. A two-mask fabrication process is used, and an angular alignment accuracy of < 0.18 degrees is achieved by minimizing the number of movable parts and controlling the assembly with mechanical limiters. Active CCRs based on torsion mirror scanners with a Q-factor of 20 are demonstrated. When used as a retroreflection data transmitter, a data rate of up to 200 bit s(-1) and a signal-to-noise ratio of 30 dB are obtained with a drive voltage of 30 V.
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