Related references
Note: Only part of the references are listed.ALD-Assisted Multiorder Dispersion Engineering of Nanophotonic Strip Waveguides
Mikhail Erdmanis et al.
JOURNAL OF LIGHTWAVE TECHNOLOGY (2012)
Replicable one-dimensional non-polarizing guided mode resonance gratings under normal incidence
Muhammad Rizwan Saleem et al.
OPTICS EXPRESS (2012)
Thermal properties of TiO2 films grown by atomic layer deposition
M. R. Saleem et al.
THIN SOLID FILMS (2012)
Towards athermal organic-inorganic guided mode resonance filters
M. R. Saleem et al.
OPTICS EXPRESS (2011)
Single-layer one-dimensional nonpolarizing guided-mode resonance filters under normal incidence
Tapani Alasaarela et al.
OPTICS LETTERS (2011)
Development of microfabricated TiO2 channel waveguides
Masayuki Furuhashi et al.
AIP ADVANCES (2011)
Electrically Benign Dry-Etching Method for Rutile TiO2 Thin-Film Capacitors with Ru Electrodes
Kyung Min Kim et al.
ELECTROCHEMICAL AND SOLID STATE LETTERS (2010)
Inductively coupled plasma etching of amorphous Al2O3 and TiO2 mask layers grown by atomic layer deposition
J. Dekker et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2006)
Narrowband, polarization-independent free-space wave notch filter
T Clausnitzer et al.
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION (2005)
Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process
RL Puurunen
JOURNAL OF APPLIED PHYSICS (2005)
Development of surface coating technology of TiO2 powder and improvement of photocatalytic activity by surface modification
TK Kim et al.
THIN SOLID FILMS (2005)
Inductively coupled plasma etching of bulk titanium for MEMS applications
ER Parker et al.
JOURNAL OF THE ELECTROCHEMICAL SOCIETY (2005)
Influence of annealing temperature on the properties of titanium oxide thin film
YQ Hou et al.
APPLIED SURFACE SCIENCE (2003)
Dry etch chemistries for TiO2 thin films
S Norasetthekul et al.
APPLIED SURFACE SCIENCE (2001)