Journal
APPLIED OPTICS
Volume 52, Issue 28, Pages 7049-7053Publisher
OPTICAL SOC AMER
DOI: 10.1364/AO.52.007049
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Funding
- National Basic Research Program of China (973 Program) [2012CB315703]
- NSFC [61120106001]
- Program for New Century Excellent Talents [NCET-10-0520]
- Tsinghua National Laboratory for Information Science and Technology (TNList) cross-discipline Foundation
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A simple fast line scan microscopic imaging approach based on a wavelength-space-time mapping technique has been proposed. With a lab-made subpicosecond pulse laser with 10 dB bandwidth of 12 nm, we experimentally demonstrate a free-space optical apparatus designed for fast line scan imaging of microscopic objects. This system has a spatial resolution of 22 mu m, field-of-view of 2.5 mm, and line scan rate of 20.9 MHz. By imaging a modified unitraveling carrier photodetector, we demonstrate the application of semiconductor device inspection for speeding up quality control. (C) 2013 Optical Society of America
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