Journal
DIAMOND AND RELATED MATERIALS
Volume 14, Issue 3-7, Pages 1051-1056Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.diamond.2005.01.020
Keywords
diamond-like carbon; silicon carbide (SiC); vibrational properties; bonding configurations
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Diamond-like (DLC), silicon- (DLC-Si) and oxygen-containing (DLC-Si-O) a-C:H films were deposited at ambient temperatures onto Si wafers by radio frequency plasma CVD from methane, tetramethylsilane, and hexamethyldisiloxane precursors. The chemical composition and bonding between the constituents are investigated by Raman spectroscopy and X-ray photoelectron spectroscopy. Influence of silicon and oxygen content on the structure of amorphous diamond-like carbon films are discussed. (c) 2005 Elsevier B.V. All rights reserved.
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