Evaluation for micro scale structures fabricated using epoxy-aluminum particle composite and its application

In this paper, mechanical properties in micro-scale structures including hardness, dimension accuracy and thermal conductivity were evaluated and these properties can be improved by using an epoxy-aluminum particle composite. In addition, an investigation into the effects of particle size on the characteristics of composite was carried out. When researching hardness and dimension accuracy, the epoxy composite having smaller size particle showed more suitable characteristics than that containing larger size particles. Whereas, when considering thermal conductivity, it was found that the epoxy composite having larger size particle was more conducive to heat transfer than that of smaller particles. Microgear, a micro scale structure, was manufactured in this paper. It was made of pure epoxy and then was transferred into an epoxy-aluminum particle composite. (c) 2004 Elsevier B.V. All rights reserved.