Journal
THIN SOLID FILMS
Volume 475, Issue 1-2, Pages 12-16Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2004.08.047
Keywords
hydrogen plasma; plasma characterization; H density; catalytic probe; FOCP
Ask authors/readers for more resources
The most important parameter in reactive hydrogen plasma is the density of neutral hydrogen atoms. The density can be measured by different means including a variety of optical emission and absorption spectroscopy methods, titration and catalytic probes. Recently, it was shown that catalytic probes have some advantages over the other methods. The main advantage is the ability for real time measurement of the atom density. A catalytic probe was used to measure the H density in an afterglow of a plasma reactor. Plasma was created in a mixture of argon and hydrogen. At a constant H-2 and Ar flow rates, the H density was found to increase with increasing power. At a low concentration of hydrogen in the gas mixture, saturation in the H density was observed. The lower the hydrogen concentration the lower the power at which the saturation was observed. At high hydrogen concentrations, no H saturation was observed. The results were explained with collision phenomena in ionized gases and heterogeneous recombination of H atoms on surfaces. (C) 2004 Elsevier B.V. All rights reserved.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available