Journal
THIN SOLID FILMS
Volume 475, Issue 1-2, Pages 287-290Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2004.07.033
Keywords
atomic force microscopy; diamond-like carbon; friction force microscopy; surface roughness; tribology
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DLC thin films were prepared by radio frequency (RF) plasma-enhanced chemical vapor deposition (PECVD) method on silicon substrates using methane (CH4), hydrogen (H-2) and gas mixture. We have checked the influence of varying RF power on DLC film. The Raman spectroscopy shows the diamond-like carbon (DLC) amorphous structure of the films. AFM images show the surface roughness of the DLC film decrease with increasing RF power. Also, the friction coefficients were investigated by atomic force microscope (AFM) in triction force microscope (FFM) mode. (C) 2004 Elsevier B.V. All rights reserved.
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