Journal
CHEMISTRY OF MATERIALS
Volume 17, Issue 6, Pages 1583-1590Publisher
AMER CHEMICAL SOC
DOI: 10.1021/cm0403816
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The atmospheric pressure chemical vapor deposition (CVD) reaction of WCl(6) with a variety of reactants (ethanoic anhydride, ethanoic acid, ethyl ethanoate, methanol, ethanol, 2-propanol, 2-methyl-2-propanol, and water) was examined on glass substrates. The deposited films displayed strikingly different morphologies with differing reactants under otherwise identical conditions. Full characterization revealed that the films were all monoclinic WO(3), but the different morphologies lead to significant differences in the functional properties of the deposited films, such as photochromism and photocatalysis. The effects of the CVD parameters on deposited films were extensively studied for the reaction of WCl(6) with ethanoic anhydride.
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