Journal
MATERIALS TODAY
Volume 8, Issue 4, Pages 30-36Publisher
ELSEVIER SCI LTD
DOI: 10.1016/S1369-7021(05)00792-3
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- IBM Research, Zurich Research Laboratory, Ruschlikon, Switzerland
- University of Basel, Basel, Switzerland
- National Center of Competence in Research in Nanoscience (Basel, Switzerland
- Swiss National Science Foundation, the Commission for Technology and Innovation (Bern, Switzerland)
- IBM Research, Zurich Research Laboratory (Ruschlikon, Switzerland)
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Miniaturized microfabricated sensors have enormous potential in gas detection, biochemical analysis, medical applications, quality and process control, and product authenticity issues. Here, we highlight an ultrasensitive mechanical way of converting (bio-) chemical or physical processes into a recordable signal using microfabricated cantilever arrays.
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