Journal
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS
Volume 44, Issue 4A, Pages 1994-1998Publisher
JAPAN SOC APPLIED PHYSICS
DOI: 10.1143/JJAP.44.1994
Keywords
X-ray; X-ray microscopy; microbeam; Fresnel zone plate; zone plate; synchrotron radiation
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A microfocusing experiment for hard X-rays has been performed to evaluate the performance of Fresnel zone plate optics. A tantalum Fresnel zone plate with an outermost zone width of 50 nm and a thickness of 0.5 mu m has been fabricated by electron-beam lithography. The focused beam size measured by a knife-edge scan is 58 turn in full-width at half-maximum for the first-order diffraction at an X-ray energy of 8 keV. It can be concluded that this zone plate has nearly diffraction-limited resolution in the hard X-ray region. The measured diffraction efficiency is 5% at 8 keV. The spot size using the third-order focus of the zone plate is measured to be approximately 30 nm.
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