4.3 Article

Microwave plasma system for material processing

Journal

IEEE TRANSACTIONS ON PLASMA SCIENCE
Volume 33, Issue 2, Pages 340-341

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TPS.2005.845005

Keywords

cavity resonator; ceramics; frequency; material processing; microwave plasma

Ask authors/readers for more resources

The microwave plasma system operates at various ranges of frequencies including 0.896, 2.45, and 10 GHz, and uses a waveguide-based applicator to generate a microwave plasma jet (MPJ) at atmospheric pressure. The plasma is formed outside the cavity due to the strong electric field, generated by the microwave power, which occurs between the gas nozzle and an aperture in the applicator. The MPJ system has produced plasmas using a variety of gases and gas mixtures, including argon, helium, oxygen, and nitrogen. The MPJ has been used successfully for various materials processing including welding, cutting, and production of fibers from high-melting temperature materials, such as ceramic.

Authors

I am an author on this paper
Click your name to claim this paper and add it to your profile.

Reviews

Primary Rating

4.3
Not enough ratings

Secondary Ratings

Novelty
-
Significance
-
Scientific rigor
-
Rate this paper

Recommended

No Data Available
No Data Available