Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 119, Issue 2, Pages 476-488Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2004.10.024
Keywords
piezoelectric actuators; microactuators; bimorph; composites
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The design and analysis of piezoelectric actuators is rarely optimized for low mass applications. However, emerging technologies such as micro air vehicles, and microrobotics in general, demand high force, high displacement, low mass actuators. Utilization of generic piezoceramics and high performance composite materials coupled with intelligent use of geometry and novel driving techniques yields low cost, rapidly prototyped, ultra-high energy density bending actuators for use in such applications. The design is based upon a laminate plate theory model for a stacked multimorph cantilever actuator, encompassing all possible layups, layer anisotropies, internal and external excitations, and intrinsic and extrinsic geometries. Using these principles, we have fabricated 12 mg PZT bimorph actuators with greater than 2 J kg(-1) energy density. This gives a performance increase of an order of magnitude or greater compared to existing commercially available piezoelectric bending actuators. (c) 2004 Elsevier B.V. All rights reserved.
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